
Mega, Kinetics Fluid Systems: State-of-the-Art Chemical and Slurry Delivery Equipment



The company’s state-of-the-art systems have gained major traction in the global market to seamlessly deliver the most difficult chemistries and sensitive slurries to their CMP tools and processes.
Recently, GlobalFoundries, an American semiconductor foundry was facing major issue of CMP slurry agglomeration, where the abrasive particles in the slurry club together and cause scratching on the wafer. Mega Fluid Systems successfully addressed the problem with a solution that monitors the flow and the pressure in the liquid/media throughout the entire distribution system. “We monitor the flow and the velocity because it is very important to keep the velocity between the laminar and turbulent flow. If the flow is too slow, the slurry comes out of the suspension and if it is too fast, the increasing shear rate will intensity the agglomeration problem in the slurries,” explains Hyatt. Mega Fluid’s solution not only significantly reduced the problem of scratching on the wafers but also increased GlobalFoundries’ overall yield in the factory.![]()
Our unmatched ability to customize slurry and chemical delivery systems for specific customer applications is our greatest strength

Mega Fluid Systems is a renowned global supplier of high-performance chemical and slurry delivery equipment to the semiconductor, LED, pharmaceutical, specialty chemicals and solar/PV industries. Kinetic Systems, a full-service process and mechanical contractor for high-technology markets, acquired it in 2018. For the future, the company plans to provide effective augmented reality maintenance by incorporating Mircosoft HoloLens, an untethered mixed reality virtual reality (VR) headset, into their maintenance model. “We have subject matter experts that can’t be at every site and with HoloLens, communication, and collaboration become more effective as they can guide the on sight field tech in the background on various technical issues,” states Hyatt. The company is also going to incorporate new innovative filtration technologies in its units and aims to keep improving its product offering with customer feedback.
Company
Mega, Kinetics Fluid Systems
Headquarters
Tualatin, OR
Management
Delton Hyatt, President
Description
Experts in chemical and slurry blend and delivery for the semiconductor market, including solar, LED and UHP industries. Their state-of-the-art systems continues to be chosen by leading-edge clients to deliver the most difficult chemistries and sensitive slurries to their CMP tools and processes. Mega, Kinetics Fluid Systems offers world-class engineering, manufacturing and testing capabilities. The company partners benefit from high-level customer service and support from their program management, sales, engineering, service and executive management teams. Mega is owned by Kinetics and located in Tualatin, Oregon, with sales and engineering offices in Chandler, AZ, and Hsinchu, Taiwan, and a strong field service presence in Malta, NY, Boise, ID, and Tualatin, OR